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[IEEE 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Nagoya University, Nagoya, Japan (2006.11.5-2006.11.8)] 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Electrostatic Capacity Type Micro Inclination Sensor Utilizing Dielectric Nano-Particles
Ueda, H., Ueno, H., Itoigawa, K., Hattori, T.Year:
2006
Language:
english
DOI:
10.1109/mhs.2006.320258
File:
PDF, 5.79 MB
english, 2006