Direct Metal Transfer Lithography for Fabricating Wire-Grid...

Journal of Microelectromechanical Systems 2011 / 08 Vol. 20; Iss. 4

Direct Metal Transfer Lithography for Fabricating Wire-Grid Polarizer on Flexible Plastic Substrate

Chen, Chun-Hung, Yu, Te-Hui, Lee, Yung-Chun
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2160046
Date:
August, 2011
File:
PDF, 973 KB
english, 2011
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