X-ray lithography beamlines in the IBM Advanced Lithography...

IBM Journal of Research and Development 1993 / 05 Vol. 37; Iss. 3

X-ray lithography beamlines in the IBM Advanced Lithography Facility

Silverman, J. P., Rippstein, R. P., Oberschmidt, J. M.
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Volume:
37
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/rd.373.0395
Date:
May, 1993
File:
PDF, 1.72 MB
english, 1993
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