Analyses of mechanical failure in nanoimprint processes
Chun-Hway Hsueh, Sanboh Lee, Hung-Yi Lin, Lai-Sheng Chen, Wei-Han WangVolume:
433
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.msea.2006.06.106
File:
PDF, 448 KB
english, 2006