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Mechanisms of fatigue in LIGA Ni MEMS thin films
Y. Yang, B.I. Imasogie, S.M. Allameh, B. Boyce, K. Lian, J. Lou, W.O. SoboyejoVolume:
444
Year:
2007
Language:
english
Pages:
12
DOI:
10.1016/j.msea.2006.06.124
File:
PDF, 3.15 MB
english, 2007