Polycrystalline silicon-germanium films for integrated...

Journal of Microelectromechanical Systems 2003 / 04 Vol. 12; Iss. 2

Polycrystalline silicon-germanium films for integrated microsystems

Franke, A.E., Heck, J.M., Tsu-Jae King,, Howe, R.T.
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Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.805051
Date:
April, 2003
File:
PDF, 1.66 MB
english, 2003
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