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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - An AFM-based device for in-situ characterization of nano-wear
Deladi, S., Berenschot, J.W., de Boer, M.J., Krijnen, G.J.M., Elwenspoek, M.C.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290552
File:
PDF, 299 KB
english, 2004