[IEEE 17th IEEE International Conference on Micro Electro...

  • Main
  • [IEEE 17th IEEE International...

[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - An AFM-based device for in-situ characterization of nano-wear

Deladi, S., Berenschot, J.W., de Boer, M.J., Krijnen, G.J.M., Elwenspoek, M.C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290552
File:
PDF, 299 KB
english, 2004
Conversion to is in progress
Conversion to is failed