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[IEEE 2007 IEEE International Conference on Control Applications - Singapore (2007.10.1-2007.10.3)] 2007 IEEE International Conference on Control Applications - Control of a high precision stage using a walking piezo actuator
Merry, Roel, de Kleijn, Niels, van de Molengraft, Rene, Steinbuch, MaartenYear:
2007
Language:
english
DOI:
10.1109/cca.2007.4389412
File:
PDF, 652 KB
english, 2007