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[IEEE 2012 25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South) (2012.07.9-2012.07.13)] 25th International Vacuum Nanoelectronics Conference - Computer simulation of high brightness and high beam current electron gun for high-throughput electron beam lithography
Murata, Hidekazu, Rokuta, Eiji, Shimoyama, Hiroshi, Yasuda, Hiroshi, Haraguchi, TakeshiYear:
2012
Language:
english
DOI:
10.1109/ivnc.2012.6316931
File:
PDF, 194 KB
english, 2012