[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Reactive magnetron sputtering of piezoelectric Cr-doped AlN thin films
Felmetsger, V. V., Mikhov, M. K.Year:
2011
Language:
english
DOI:
10.1109/ultsym.2011.0204
File:
PDF, 12.61 MB
english, 2011