New global insight in ultrathin oxide reliability using...

IEEE Transactions on Device and Materials Reliability 2001 / 3 Vol. 1; Iss. 1

New global insight in ultrathin oxide reliability using accurate experimental methodology and comprehensive database

Wu, E., Nowak, E., Vayshenker, A., McKenna, J., Harmon, D., Vollertsen, R.-P.
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Volume:
1
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/7298.946461
Date:
March, 2001
File:
PDF, 474 KB
english, 2001
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