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New global insight in ultrathin oxide reliability using accurate experimental methodology and comprehensive database
Wu, E., Nowak, E., Vayshenker, A., McKenna, J., Harmon, D., Vollertsen, R.-P.Volume:
1
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/7298.946461
Date:
March, 2001
File:
PDF, 474 KB
english, 2001