[IEEE 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation (ETFA) - Cagliari, Italy (2013.09.10-2013.09.13)] 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation (ETFA) - Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials
Fatikow, S., Eichhorn, V., Bartenwerfer, M., Krohs, F.Year:
2013
Language:
english
DOI:
10.1109/etfa.2013.6648143
File:
PDF, 1.08 MB
english, 2013