[IEEE 2011 IEEE 8th International Conference on Group IV Photonics (GFP) - London, United Kingdom (2011.09.14-2011.09.16)] 8th IEEE International Conference on Group IV Photonics - SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device
Selvaraja, Shankar Kumar, Rosseel, Erik, Fernandez, Luis, Tabat, Martin, Bogaerts, Wim, Hautala, John, Absil, PhilippeYear:
2011
Language:
english
DOI:
10.1109/group4.2011.6053719
File:
PDF, 472 KB
english, 2011