[IEEE 2011 IEEE 8th International Conference on Group IV...

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[IEEE 2011 IEEE 8th International Conference on Group IV Photonics (GFP) - London, United Kingdom (2011.09.14-2011.09.16)] 8th IEEE International Conference on Group IV Photonics - SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device

Selvaraja, Shankar Kumar, Rosseel, Erik, Fernandez, Luis, Tabat, Martin, Bogaerts, Wim, Hautala, John, Absil, Philippe
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Year:
2011
Language:
english
DOI:
10.1109/group4.2011.6053719
File:
PDF, 472 KB
english, 2011
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