[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Linz, Austria (2011.04.18-2011.04.20)] 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Local strength measurement technique for miniaturised silicon-based components
Deluca, Marco, Bermejo, Raul, Pletz, Martin, Morianz, Mike, Stahr, Johannes, Supancic, Peter, Danzer, RobertYear:
2011
Language:
english
DOI:
10.1109/ESIME.2011.5765812
File:
PDF, 994 KB
english, 2011