[IEEE Technical Digest., International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1988)] Technical Digest., International Electron Devices Meeting - Development of highly reliable Al-Si-Pd alloy interconnection for VLSI
Onuki, J., Koubuchi, Y., Fukada, S., Suwa, M., Misawa, Y., Itagaki, T.Year:
1988
DOI:
10.1109/iedm.1988.32853
File:
PDF, 363 KB
1988