[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - A laterally driven capacitive RF MEMS switch using parylene as dielectric layer
Xunjun He,, Zhiqiu Lv,, Bo Liu,, Zhihong Li,Year:
2010
Language:
english
DOI:
10.1109/icsens.2010.5689853
File:
PDF, 2.00 MB
english, 2010