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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Investigation of dielectric degradation of microwave capacitive microswitches
Melle, S., Flourens, F., Dubuc, D., Grenier, K., Pons, P., Muraro, J.L., Segui, Y., Plana, R.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290542
File:
PDF, 281 KB
english, 2004