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[IEEE 2007 IEEE Conference on Electron Devices and Solid-State Circuits - Tainan, Taiwan (2007.12.20-2007.12.22)] 2007 IEEE Conference on Electron Devices and Solid-State Circuits - Microwave plasma anneal to fabricate silicides and restrain the formation of unstable phases
Wang, Tao, Dai, Yongbin, Dai, Qingyuan, Ng, Ricky M. Y., Chan, Wan Tim, Lee, Patrick, Chan, MansunYear:
2007
Language:
english
DOI:
10.1109/edssc.2007.4450198
File:
PDF, 4.23 MB
english, 2007