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[IEEE 2012 IEEE-NPSS Real Time Conference (RT 2012) - Berkeley, CA, USA (2012.06.9-2012.06.15)] 2012 18th IEEE-NPSS Real Time Conference - Feedforward power distortion correction in RF power delivery systems for plasma processing systems
Coumou, David J.Year:
2012
Language:
english
DOI:
10.1109/RTC.2012.6418192
File:
PDF, 666 KB
english, 2012