[IEEE AFRICON 2007 - Windhoek, South Africa (2007.10.26-2007.10.28)] AFRICON 2007 - Thin FC film for sidewall passivation in SCREAM process for MEMS
Vrtacnik, D., Resnik, D., Aljancic, U., Mozek, M., Penic, S., Amon, S.Year:
2007
Language:
english
DOI:
10.1109/afrcon.2007.4401632
File:
PDF, 2.34 MB
english, 2007