Characterization of a Dipole Surface Drive Actuator With...

Journal of Microelectromechanical Systems 2006 / 12 Vol. 15; Iss. 6

Characterization of a Dipole Surface Drive Actuator With Large Travel and Force

Agarwal, Manu, Dutton, David T., Theil, Jeremy A., Bai, Qing, Par, Evelyn, Hoen, Storrs
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.883886
Date:
December, 2006
File:
PDF, 1.05 MB
english, 2006
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