![](/img/cover-not-exists.png)
[IEEE 2014 IEEE International Conference on Mechatronics and Automation (ICMA) - Tianjin, China (2014.8.3-2014.8.6)] 2014 IEEE International Conference on Mechatronics and Automation - Mechanism measurement of micro-displacement based on a novel MZ interferometer
Yuan, Shuo, Tong, Zhengrong, Zhang, Weihua, Cao, YeYear:
2014
Language:
english
DOI:
10.1109/icma.2014.6885722
File:
PDF, 366 KB
english, 2014