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[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - A multi-chip directly mounted 512 MEMS mirror array module with hermetically sealed package for large optical cross-connects
Xiaoyu Mi,, Soneda, H., Okuda, H., Tsuboi, O., Norinao,, Kouma,, Mizuno, Y., Ueda, S., Sawaki, I.Year:
2005
Language:
english
DOI:
10.1109/OMEMS.2005.1540146
File:
PDF, 396 KB
english, 2005