Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment
Hsiao-Ming Tung, Jia-Hong Huang, Ding-Guey Tsai, Chi-Fong Ai, Ge-Ping YuVolume:
500
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.msea.2008.09.006
File:
PDF, 264 KB
english, 2009