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[IEEE 1995 IEEE International SOI Conference - Tucson, AZ, USA (3-5 Oct. 1995)] 1995 IEEE International SOI Conference Proceedings - "Smart cut": a promising new SOI material technology
Bruel, M., Aspar, B., Charlet, B., Maleville, C., Poumeyrol, T., Soubie, A., Auberton-Herve, A.J., Lamure, J.M., Barge, T., Metral, F., Trucchi, S.Year:
1995
Language:
english
DOI:
10.1109/soi.1995.526518
File:
PDF, 378 KB
english, 1995