Simulating the behavior of MEMS devices: computational...

IEEE Computational Science and Engineering 1997 / Jan.-March Vol. 4; Iss. 1

Simulating the behavior of MEMS devices: computational methods and needs

Senturia, S.D., Azuru, N., White, J.
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Volume:
4
Language:
english
Journal:
IEEE Computational Science and Engineering
DOI:
10.1109/99.590854
Date:
January, 1997
File:
PDF, 220 KB
english, 1997
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