Vertical comb drive actuator for the measurement of piezoelectric coefficients in small-scale systems
Wooldridge, J, Muniz-Piniella, A, Stewart, M, Shean, T A V, Weaver, P M, Cain, M GVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035028
Date:
March, 2013
File:
PDF, 3.45 MB
english, 2013