[IEEE 2010 IEEE 2nd Russia School and Seminar on Fundamental Problems of Micro/Nanosystems Technologies (MNST) - Novosibirsk, Russia (2010.12.9-2010.12.11)] 2010 IEEE 2nd Russia School and Seminar on Fundamental Problems of Micro/Nanosystems Technologis (MNST) - Self-aligned multilayer dielectric “dummy gate” technology for L-, S- and X-band GaAs MMICs fabrication

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