Notch Root Oxide Formation During Fatigue of...

Journal of Microelectromechanical Systems 2007 / 12 Vol. 16; Iss. 6

Notch Root Oxide Formation During Fatigue of Polycrystalline Silicon Structural Films

Pierron, Olivier N., Muhlstein, Christopher L.
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2007.906076
Date:
December, 2007
File:
PDF, 959 KB
english, 2007
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