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[IEEE 2012 Microsystems for Measurement and Instrumentation (MAMNA) - Annapolis, MD, USA (2012.03.27-2012.03.27)] 2012 Microsystems for Measurement and Instrumentation (MAMNA) - Thin-film piezoelectric traveling wave ultrasonic rotary motor
Rudy, Ryan Q., DeVoe, Don L., Smith, Gabriel L., Polcawich, Ronald G.Year:
2012
Language:
english
DOI:
10.1109/mamna.2012.6195103
File:
PDF, 527 KB
english, 2012