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Line Edge Detection and Characterization in SEM Images Using Wavelets
Sun, Wei, Romagnoli, Jose A., Tringe, Joseph W., Letant, Sonia E., Stroeve, Pieter, Palazoglu, AhmetVolume:
22
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2011174
Date:
February, 2009
File:
PDF, 1.67 MB
english, 2009