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[IEEE Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits - Honolulu, HI (June 3-4, 1990)] Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits - Numerical Modeling Of Optical Metrology Schemes For IC Line-width Measurements
Chi-Min Yuan,, Strojwas, A.J.Year:
1990
Language:
english
DOI:
10.1109/nupad.1990.748248
File:
PDF, 155 KB
english, 1990