[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology
Van Toan, Nguyen, Kubota, Tomohiro, Seknar, Halubai, Samukawa, Seiji, Ono, TakahitoYear:
2014
Language:
english
DOI:
10.1109/nems.2014.6908747
File:
PDF, 3.32 MB
english, 2014