[IEEE The 17th Annual Meeting of the IEEELasers and Electro-Optics Society, 2004. LEOS 2004. - Rio Grande, Puerto Rico (Nov. 8-9, 2004)] The 17th Annual Meeting of the IEEELasers and Electro-Optics Society, 2004. LEOS 2004. - Interferometric lithography at 47nm with a table-top EUV laser
Capeluto, M.G., Vaschenko, G., Marconi, M.C., Grisham, M., Menoni, C.S., Rocca, J.J.Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/leos.2004.1363527
File:
PDF, 122 KB
english, 2004