Patterned Electrodes for Thickness Shear Mode Quartz...

Patterned Electrodes for Thickness Shear Mode Quartz Resonators to Achieve Uniform Mass Sensitivity Distribution

Richardson, Anthony, Bhethanabotla, Venkat R., Smith, Allan L., Josse, Fabien
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Volume:
9
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2009.2030658
Date:
December, 2009
File:
PDF, 705 KB
english, 2009
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