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[IEEE Eleventh International Vacuum Microelectronics Conference. IVMC'98 - Asheville, NC, USA (19-24 July 1998)] Eleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382) - The studies of thin film coatings on the surface of porous silicon
Galiy, P.V., Monastyrskii, L.S., Nenchuk, T.M., Boyko, J.V., Rudyi, I.O.Year:
1998
Language:
english
DOI:
10.1109/ivmc.1998.728766
File:
PDF, 60 KB
english, 1998