A piezoelectric active mirror suspension system embedded...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2012 / 09 Vol. 59; Iss. 9

A piezoelectric active mirror suspension system embedded into low-temperature cofired ceramic

Sobocinski, M., Leinonen, M., Juuti, J., Jantunen, H.
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Volume:
59
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2012.2418
Date:
September, 2012
File:
PDF, 552 KB
english, 2012
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