[IEEE 2012 IEEE Symposium on VLSI Technology - Honolulu,...

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[IEEE 2012 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2012.06.12-2012.06.14)] 2012 Symposium on VLSI Technology (VLSIT) - Development of ultra-thin Chip-on-Wafer process using bumpless interconnects for three-dimensional memory/logic applications

Maeda, N., Kitada, H., Fujimoto, K., Kim, Y. S., Kodama, S., Yoshimi, S., Akazawa, M., Mizushima, Y., Ohba, T.
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Year:
2012
Language:
english
DOI:
10.1109/vlsit.2012.6242516
File:
PDF, 413 KB
english, 2012
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