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Fabrication of PECVD-silicon oxynitride-based optical waveguides
M.I. Alayo, D. Criado, M.N.P. Carreño, I. PereyraVolume:
112
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2004.05.037
File:
PDF, 430 KB
english, 2004