Characterization of silicon carbide thin films grown on Si...

Materials Science and Engineering: B 2004 Vol. 114-115; Iss. none

Characterization of silicon carbide thin films grown on Si and SiO2/Si substrates

P. Zanola, E. Bontempi, C. Ricciardi, G. Barucca, L.E. Depero
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Volume:
114-115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.013
File:
PDF, 227 KB
english, 2004
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