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Thermal stability of boron electrical activation in preamorphised ultra-shallow junctions
F. Cristiano, N. Cherkashin, P. Calvo, Y. Lamrani, X. Hebras, A. Claverie, W. Lerch, S. PaulVolume:
114-115
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2004.07.049
File:
PDF, 233 KB
english, 2004