Excimer laser annealing of shallow As and B doped layers

Materials Science and Engineering: B 2004 Vol. 114-115; Iss. none

Excimer laser annealing of shallow As and B doped layers

E.V. Monakhov, B.G. Svensson, M.K. Linnarsson, A. La Magna, V. Privitera, M. Camalleri, G. Fortunato, L. Mariucci
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Volume:
114-115
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2004.07.062
File:
PDF, 167 KB
english, 2004
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