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Effect of germanium pre-amorphization on solid-phase epitaxial regrowth of antimony and arsenic ion-implanted silicon
Shahram Ghanad Tavakoli, Sungkweon Baek, Hyunsang HwangVolume:
114-115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.067
File:
PDF, 161 KB
english, 2004