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The effects of Ta on the formation of Ni-silicide in Ni0.95xTax0.05/Si systems
Dongwon Lee, Kihoon Do, Dae-Hong Ko, Siyoung Choi, Ja-Hum Ku, Cheol-Woong YangVolume:
114-115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.081
File:
PDF, 265 KB
english, 2004