[IEEE 2006 International Symposium on Discharges and Electrical Insulation in Vacuum - Matsue, Japan (2006.09.25-2006.09.29)] 2006 International Symposium on Discharges and Electrical Insulation in Vacuum - The surface modification effect by irradiation of a surface wave excited hydrogen plasma onto zinc oxide thin films
Nakayama, Takamichi, Takizawa, Tsutomu, Sakamoto, Yuichi, Kashiwagi, KunihiroYear:
2006
Language:
english
DOI:
10.1109/deiv.2006.357365
File:
PDF, 2.74 MB
english, 2006