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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - A novel electrostatically driven bulk-micromachined on-off optical switch
Cong-Shun Wang,, Jing Fang,, Sheng Chang,, Zhen-Chuan Yang,, Da-Cheng Zhang,Volume:
2
Year:
2001
Language:
english
DOI:
10.1109/icsict.2001.982028
File:
PDF, 211 KB
english, 2001