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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A MEMS sensor for mean shear stress measurements in high-speed turbulent flows with backside interconnects
O'Grady, A., Larger, R., Tiliakos, N., Papadopoulos, G., Modi, V., Frechette, L. G.Year:
2009
Language:
english
DOI:
10.1109/SENSOR.2009.5285510
File:
PDF, 1.08 MB
english, 2009