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Fluorine-free and fluorine containing MOCVD precursors for electronic oxides: a comparison
C. Bedoya, G.G. Condorelli, A. Di Mauro, G. Anastasi, I.L. Fragalà, J.G. Lisoni, D. WoutersVolume:
118
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2004.12.045
File:
PDF, 187 KB
english, 2005