Effect of nonionic surfactants on the stability of alumina...

Materials Science and Engineering: B 2005 Vol. 118; Iss. 1-3

Effect of nonionic surfactants on the stability of alumina slurry for Cu CMP

Do-Won Lee, Nam-Hoon Kim, Eui-Goo Chang
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Volume:
118
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.mseb.2004.12.060
File:
PDF, 789 KB
english, 2005
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