An acoustic micrometer and its application to layer thickness measurements
Tsukahara, Y., Nakaso, N., Kushibiki, J.-i., Chubachi, N.Volume:
36
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.19171
Date:
May, 1989
File:
PDF, 670 KB
english, 1989